Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators
This paper focuses on the design, fabrication, and characterization of silicon-packaged permanent-magnet (PM) microgenerators. The use of silicon packaging favors fine control on shape and dimensions in batch fabrication and provides a path toward high rotational speeds (1Mr/min), a requirement for...
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| Format: | Article |
| Language: | en_US |
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Institute of Electrical and Electronics Engineers (IEEE)
2012
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| Online Access: | http://hdl.handle.net/1721.1/72960 https://orcid.org/0000-0002-5765-4369 https://orcid.org/0000-0003-2167-9860 |
| _version_ | 1826212586285170688 |
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| author | Herrault, Florian Yen, Bernard C. Ji, Chang-Hyeon Spakovszky, Zoltan S. Lang, Jeffrey H. Allen, Mark G. |
| author2 | Massachusetts Institute of Technology. Department of Aeronautics and Astronautics |
| author_facet | Massachusetts Institute of Technology. Department of Aeronautics and Astronautics Herrault, Florian Yen, Bernard C. Ji, Chang-Hyeon Spakovszky, Zoltan S. Lang, Jeffrey H. Allen, Mark G. |
| author_sort | Herrault, Florian |
| collection | MIT |
| description | This paper focuses on the design, fabrication, and characterization of silicon-packaged permanent-magnet (PM) microgenerators. The use of silicon packaging favors fine control on shape and dimensions in batch fabrication and provides a path toward high rotational speeds (1Mr/min), a requirement for ultimate compactness of microgenerators. The successful silicon packaging of these microgenerators consisted of three essential elements: (1) a winding scheme allowing both nonplanar fabrication and through-wafer interconnects; (2) laminations built into the silicon for enhanced electrical performance; and (3) a balancing scheme for the heavy PM rotor to ensure its maximum performance. The devices were fabricated using bonded silicon wafers, integrated magnetics, and an electroplated metal. The mechanical strength of the 12-mm-diameter silicon-packaged PM rotors was evaluated at high rotational speeds using an external spindle drive. Speeds up to 200000 r/min were achieved prior to a mechanical rotor failure. The generators were electrically characterized, and an output power in excess of 1 W across a resistive load of 0.32 ?? was measured at a maximum speed. A 225% power increase was also experimentally determined due to the addition of a laminated stator back iron. |
| first_indexed | 2024-09-23T15:27:48Z |
| format | Article |
| id | mit-1721.1/72960 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T15:27:48Z |
| publishDate | 2012 |
| publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| record_format | dspace |
| spelling | mit-1721.1/729602022-10-02T02:42:49Z Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators Herrault, Florian Yen, Bernard C. Ji, Chang-Hyeon Spakovszky, Zoltan S. Lang, Jeffrey H. Allen, Mark G. Massachusetts Institute of Technology. Department of Aeronautics and Astronautics Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Lang, Jeffrey H. Yen, Bernard C. Spakovszky, Zoltan S. Lang, Jeffrey H. This paper focuses on the design, fabrication, and characterization of silicon-packaged permanent-magnet (PM) microgenerators. The use of silicon packaging favors fine control on shape and dimensions in batch fabrication and provides a path toward high rotational speeds (1Mr/min), a requirement for ultimate compactness of microgenerators. The successful silicon packaging of these microgenerators consisted of three essential elements: (1) a winding scheme allowing both nonplanar fabrication and through-wafer interconnects; (2) laminations built into the silicon for enhanced electrical performance; and (3) a balancing scheme for the heavy PM rotor to ensure its maximum performance. The devices were fabricated using bonded silicon wafers, integrated magnetics, and an electroplated metal. The mechanical strength of the 12-mm-diameter silicon-packaged PM rotors was evaluated at high rotational speeds using an external spindle drive. Speeds up to 200000 r/min were achieved prior to a mechanical rotor failure. The generators were electrically characterized, and an output power in excess of 1 W across a resistive load of 0.32 ?? was measured at a maximum speed. A 225% power increase was also experimentally determined due to the addition of a laminated stator back iron. Collaborative Technology Alliance In Power And Energy Program. United States. Army Research Laboratory (DAAD19- 01-2-0010) 2012-09-14T15:34:36Z 2012-09-14T15:34:36Z 2010-02 2009-10 Article http://purl.org/eprint/type/JournalArticle 1057-7157 http://hdl.handle.net/1721.1/72960 Herrault, Florian et al. “Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators.” Journal of Microelectromechanical Systems 19.1 (2010): 4–13. © Copyright 2010 IEEE https://orcid.org/0000-0002-5765-4369 https://orcid.org/0000-0003-2167-9860 en_US http://dx.doi.org/10.1109/jmems.2009.2036583 Journal of Microelectromechanical Systems Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Institute of Electrical and Electronics Engineers (IEEE) IEEE |
| spellingShingle | Herrault, Florian Yen, Bernard C. Ji, Chang-Hyeon Spakovszky, Zoltan S. Lang, Jeffrey H. Allen, Mark G. Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators |
| title | Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators |
| title_full | Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators |
| title_fullStr | Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators |
| title_full_unstemmed | Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators |
| title_short | Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators |
| title_sort | fabrication and performance of silicon embedded permanent magnet microgenerators |
| url | http://hdl.handle.net/1721.1/72960 https://orcid.org/0000-0002-5765-4369 https://orcid.org/0000-0003-2167-9860 |
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