50-nm E-mode In[subscript 0.7]Ga[subscript 0.3]As PHEMTs on 100-mm InP substrate with f[subscript max] > 1 THz

We have demonstrated 50-nm enhancement-mode (E-mode) In[subscript 0.7]Ga[subscript 0.3]As PHEMTs with f[subscript max] in excess of 1 THz. The devices feature a Pt gate sinking process to effectively thin down the In[subscript 0.52]Al[subscript 0.48]As barrier layer, together with a two-step recess...

Full description

Bibliographic Details
Main Authors: del Alamo, Jesus A., Kim, Dae-Hyun, Chen, Peter, Ha, Wonill, Urteaga, Miguel, Brar, B.
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers (IEEE) 2012
Online Access:http://hdl.handle.net/1721.1/73128
_version_ 1826195829363310592
author del Alamo, Jesus A.
Kim, Dae-Hyun
Chen, Peter
Ha, Wonill
Urteaga, Miguel
Brar, B.
author2 Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
author_facet Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
del Alamo, Jesus A.
Kim, Dae-Hyun
Chen, Peter
Ha, Wonill
Urteaga, Miguel
Brar, B.
author_sort del Alamo, Jesus A.
collection MIT
description We have demonstrated 50-nm enhancement-mode (E-mode) In[subscript 0.7]Ga[subscript 0.3]As PHEMTs with f[subscript max] in excess of 1 THz. The devices feature a Pt gate sinking process to effectively thin down the In[subscript 0.52]Al[subscript 0.48]As barrier layer, together with a two-step recess process. The fabricated device with L[subscript g] = 50-nm exhibits V[subscript T] = 0.1 V, g[subscript m,max] = 1.75 mS/μm, f[subscript T] = 465 GHz and f[subscript max] = 1.06 THz at a moderate value of V[subscript DS] = 0.75 V. In addition, we have physically modeled the abnormal peaky behavior in Mason's unilateral gain (U[subscript g]) at high values of VDS. A revised small signal model that includes a shunting R[subscript gd-NDR] with negative value successfully describes the behavior of the device from 1 to 67 GHz.
first_indexed 2024-09-23T10:16:07Z
format Article
id mit-1721.1/73128
institution Massachusetts Institute of Technology
language en_US
last_indexed 2024-09-23T10:16:07Z
publishDate 2012
publisher Institute of Electrical and Electronics Engineers (IEEE)
record_format dspace
spelling mit-1721.1/731282022-09-30T20:01:38Z 50-nm E-mode In[subscript 0.7]Ga[subscript 0.3]As PHEMTs on 100-mm InP substrate with f[subscript max] > 1 THz del Alamo, Jesus A. Kim, Dae-Hyun Chen, Peter Ha, Wonill Urteaga, Miguel Brar, B. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science del Alamo, Jesus A. We have demonstrated 50-nm enhancement-mode (E-mode) In[subscript 0.7]Ga[subscript 0.3]As PHEMTs with f[subscript max] in excess of 1 THz. The devices feature a Pt gate sinking process to effectively thin down the In[subscript 0.52]Al[subscript 0.48]As barrier layer, together with a two-step recess process. The fabricated device with L[subscript g] = 50-nm exhibits V[subscript T] = 0.1 V, g[subscript m,max] = 1.75 mS/μm, f[subscript T] = 465 GHz and f[subscript max] = 1.06 THz at a moderate value of V[subscript DS] = 0.75 V. In addition, we have physically modeled the abnormal peaky behavior in Mason's unilateral gain (U[subscript g]) at high values of VDS. A revised small signal model that includes a shunting R[subscript gd-NDR] with negative value successfully describes the behavior of the device from 1 to 67 GHz. United States. Defense Advanced Research Projects Agency (Space and Naval Warfare Systems Center San Diego (U.S.)) (Contract N660001-06-C-2025) 2012-09-24T18:12:24Z 2012-09-24T18:12:24Z 2010-12 2010-12 Article http://purl.org/eprint/type/ConferencePaper 978-1-4244-7419-6 978-1-4424-7418-5 0163-1918 http://hdl.handle.net/1721.1/73128 Kim, Dae-Hyun et al. “50-nm E-mode In[subscript 0.7]IEEE International Electron Devices Meeting (IEDM), 2010. 30.6.1–30.6.4. © Copyright 2010 IEEE en_US http://dx.doi.org/10.1109/IEDM.2010.5703453 Proceedings of the IEEE International Electron Devices Meeting (IEDM), 2010 Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Institute of Electrical and Electronics Engineers (IEEE) IEEE
spellingShingle del Alamo, Jesus A.
Kim, Dae-Hyun
Chen, Peter
Ha, Wonill
Urteaga, Miguel
Brar, B.
50-nm E-mode In[subscript 0.7]Ga[subscript 0.3]As PHEMTs on 100-mm InP substrate with f[subscript max] > 1 THz
title 50-nm E-mode In[subscript 0.7]Ga[subscript 0.3]As PHEMTs on 100-mm InP substrate with f[subscript max] > 1 THz
title_full 50-nm E-mode In[subscript 0.7]Ga[subscript 0.3]As PHEMTs on 100-mm InP substrate with f[subscript max] > 1 THz
title_fullStr 50-nm E-mode In[subscript 0.7]Ga[subscript 0.3]As PHEMTs on 100-mm InP substrate with f[subscript max] > 1 THz
title_full_unstemmed 50-nm E-mode In[subscript 0.7]Ga[subscript 0.3]As PHEMTs on 100-mm InP substrate with f[subscript max] > 1 THz
title_short 50-nm E-mode In[subscript 0.7]Ga[subscript 0.3]As PHEMTs on 100-mm InP substrate with f[subscript max] > 1 THz
title_sort 50 nm e mode in subscript 0 7 ga subscript 0 3 as phemts on 100 mm inp substrate with f subscript max 1 thz
url http://hdl.handle.net/1721.1/73128
work_keys_str_mv AT delalamojesusa 50nmemodeinsubscript07gasubscript03asphemtson100mminpsubstratewithfsubscriptmax1thz
AT kimdaehyun 50nmemodeinsubscript07gasubscript03asphemtson100mminpsubstratewithfsubscriptmax1thz
AT chenpeter 50nmemodeinsubscript07gasubscript03asphemtson100mminpsubstratewithfsubscriptmax1thz
AT hawonill 50nmemodeinsubscript07gasubscript03asphemtson100mminpsubstratewithfsubscriptmax1thz
AT urteagamiguel 50nmemodeinsubscript07gasubscript03asphemtson100mminpsubstratewithfsubscriptmax1thz
AT brarb 50nmemodeinsubscript07gasubscript03asphemtson100mminpsubstratewithfsubscriptmax1thz