Cleanroom design
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Architecture, 1987.
Main Author: | Erickson, Douglas H |
---|---|
Other Authors: | Leon Glicksman. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2012
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/73283 |
Similar Items
-
To establish a quality management system (QMS) for cleanroom wafer processes
by: Mok, Hiang Teck.
Published: (2008) -
Fundamentals of digital logic design : with VLSI circuit applications/
by: 199424 Pucknell, Douglas A.
Published: (1990) -
Design and test techniques for VLSI and WSI circuits /
by: Massara, R. E.
Published: (1989) -
Analisa tegasan ke atas bekas tekanan; Pengaruh sudut bilah keluar pam empar; Analisa sifat-sifat aliran di dalam bilik bersih dengan menggunakan penapis yang berbeza; Penganalisaan simulasi pam haba; Kitar penyejukan penjerapan pepejal / [mikrofilem]
by: Adnan Mohamad, et al.
Published: (1994) -
Reuse in electronic design : from information modelling to intellectual properties /
by: 230304 Conradi, Peter
Published: (1999)