Cleanroom design

Cleanroom design

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Architecture, 1987.

Bibliographic Details
Main Author:	Erickson, Douglas H
Other Authors:	Leon Glicksman.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2012
Subjects:	Architecture. TH7694 Clean rooms Design and construction Integrated circuits industry
Online Access:	http://hdl.handle.net/1721.1/73283

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