Effects of Platinum on NiPtSiGe/n-SiGe and NiPtSi/n-Si Schottky Contacts

Effects of Platinum on NiPtSiGe/n-SiGe and NiPtSi/n-Si Schottky Contacts

Solid phase reaction of NiPt/Si and NiPt/SiGe is one of the key issues for silicide (germanosilicide) technology. Especially, the NiPtSiGe, in which four elements are involved, is a very complex system. As a result, a detailed study is necessary for the interfacial reaction between NiPt alloy film a...

Cur síos iomlán

Sonraí bibleagrafaíochta
Príomhchruthaitheoirí: Jin, Lijuan, Pey, Kin Leong, Choi, Wee Kiong, Fitzgerald, Eugene A., Antoniadis, Dimitri A., Chi, D.Z.
Formáid: Alt
Teanga:English
Foilsithe / Cruthaithe: 2004
Ábhair:
Schottky barrier height (SBH)
Thermionicemission model
Pinch-off model
germanosilicides/n-Si0/7Ge0.3
Rochtain ar líne:http://hdl.handle.net/1721.1/7363

Ar líne

http://hdl.handle.net/1721.1/7363

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