Electrochemical development of hydrogen silsesquioxane by applying an electrical potential
We present a new method for developing hydrogen silsesquioxane (HSQ) by using electrical potentials and deionized water. Nested-L test structures with a pitch as small as 9 nm were developed using this electrochemical technique in saline solution without adding hydroxyl ions. Furthermore, we showed...
| Main Authors: | , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
IOP Publishing
2012
|
| Online Access: | http://hdl.handle.net/1721.1/74122 https://orcid.org/0000-0002-9129-4731 https://orcid.org/0000-0001-7453-9031 |