Electrochemical development of hydrogen silsesquioxane by applying an electrical potential
We present a new method for developing hydrogen silsesquioxane (HSQ) by using electrical potentials and deionized water. Nested-L test structures with a pitch as small as 9 nm were developed using this electrochemical technique in saline solution without adding hydroxyl ions. Furthermore, we showed...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | en_US |
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IOP Publishing
2012
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| Online Access: | http://hdl.handle.net/1721.1/74122 https://orcid.org/0000-0002-9129-4731 https://orcid.org/0000-0001-7453-9031 |
| _version_ | 1811076730356498432 |
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| author | Strobel, Sebastian Harry, Katherine J. Duan, Huigao Yang, Joel K. W. Manfrinato, Vitor Riseti Berggren, Karl K. |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Strobel, Sebastian Harry, Katherine J. Duan, Huigao Yang, Joel K. W. Manfrinato, Vitor Riseti Berggren, Karl K. |
| author_sort | Strobel, Sebastian |
| collection | MIT |
| description | We present a new method for developing hydrogen silsesquioxane (HSQ) by using electrical potentials and deionized water. Nested-L test structures with a pitch as small as 9 nm were developed using this electrochemical technique in saline solution without adding hydroxyl ions. Furthermore, we showed that high-resolution structures can be electrochemically developed in deionized water alone. Electrochemical development is controlled by the applied voltage and may overcome several of the limitations discussed for alkaline developers, such as poor hydroxyl anion diffusion and charge repulsion effects in small trenches. |
| first_indexed | 2024-09-23T10:26:38Z |
| format | Article |
| id | mit-1721.1/74122 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T10:26:38Z |
| publishDate | 2012 |
| publisher | IOP Publishing |
| record_format | dspace |
| spelling | mit-1721.1/741222022-09-26T17:56:45Z Electrochemical development of hydrogen silsesquioxane by applying an electrical potential Strobel, Sebastian Harry, Katherine J. Duan, Huigao Yang, Joel K. W. Manfrinato, Vitor Riseti Berggren, Karl K. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Strobel, Sebastian Harry, Katherine J. Duan, Huigao Yang, Joel K. W. Manfrinato, Vitor Riseti Berggren, Karl K. We present a new method for developing hydrogen silsesquioxane (HSQ) by using electrical potentials and deionized water. Nested-L test structures with a pitch as small as 9 nm were developed using this electrochemical technique in saline solution without adding hydroxyl ions. Furthermore, we showed that high-resolution structures can be electrochemically developed in deionized water alone. Electrochemical development is controlled by the applied voltage and may overcome several of the limitations discussed for alkaline developers, such as poor hydroxyl anion diffusion and charge repulsion effects in small trenches. National Science Foundation (U.S.) Massachusetts Institute of Technology. Materials Processing Center Massachusetts Institute of Technology. Center for Materials Science and Engineering 2012-10-18T20:37:22Z 2012-10-18T20:37:22Z 2011-08 2011-07 Article http://purl.org/eprint/type/JournalArticle 0957-4484 1361-6528 http://hdl.handle.net/1721.1/74122 Strobel, Sebastian et al. “Electrochemical Development of Hydrogen Silsesquioxane by Applying an Electrical Potential.” Nanotechnology 22.37 (2011): 375301. https://orcid.org/0000-0002-9129-4731 https://orcid.org/0000-0001-7453-9031 en_US http://dx.doi.org/10.1088/0957-4484/22/37/375301 Nanotechnology Creative Commons Attribution-Noncommercial-Share Alike 3.0 http://creativecommons.org/licenses/by-nc-sa/3.0/ application/pdf IOP Publishing MIT web domain |
| spellingShingle | Strobel, Sebastian Harry, Katherine J. Duan, Huigao Yang, Joel K. W. Manfrinato, Vitor Riseti Berggren, Karl K. Electrochemical development of hydrogen silsesquioxane by applying an electrical potential |
| title | Electrochemical development of hydrogen silsesquioxane by applying an electrical potential |
| title_full | Electrochemical development of hydrogen silsesquioxane by applying an electrical potential |
| title_fullStr | Electrochemical development of hydrogen silsesquioxane by applying an electrical potential |
| title_full_unstemmed | Electrochemical development of hydrogen silsesquioxane by applying an electrical potential |
| title_short | Electrochemical development of hydrogen silsesquioxane by applying an electrical potential |
| title_sort | electrochemical development of hydrogen silsesquioxane by applying an electrical potential |
| url | http://hdl.handle.net/1721.1/74122 https://orcid.org/0000-0002-9129-4731 https://orcid.org/0000-0001-7453-9031 |
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