Performance-Driven Microfabrication-Oriented Methodology for MEMS Conceptual Design with Application in Microfluidic Device Design
Performance and manufacturability are two important issues that must be taken into account during MEMS design. Existing MEMS design models or systems follow a process-driven design paradigm, that is, design starts from the specification of process sequence or the customization of foundry-ready proce...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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2004
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/7460 |