Experimental Investigation of Size Effects on the Thermal Conductivity of Silicon-Germanium Alloy Thin Films

Experimental Investigation of Size Effects on the Thermal Conductivity of Silicon-Germanium Alloy Thin Films

We experimentally investigate the role of size effects and boundary scattering on the thermal conductivity of silicon-germanium alloys. The thermal conductivities of a series of epitaxially grown Si[subscript 1-x] Ge[subscript x] thin films with varying thicknesses and compositions were measured wit...

Повний опис

Бібліографічні деталі
Автори: Cheaito, Ramez, Duda, John C., Beechem, Thomas E., Hattar, Khalid, Ihlefeld, Jon F., Medlin, Douglas L., Rodriguez, Mark A., Campion, Michael John, Piekos, Edward S., Hopkins, Patrick E.
Інші автори: Massachusetts Institute of Technology. Department of Materials Science and Engineering
Формат: Стаття
Мова:en_US
Опубліковано: American Physical Society 2012
Онлайн доступ:http://hdl.handle.net/1721.1/75439
https://orcid.org/0000-0001-7208-4360

Інтернет

http://hdl.handle.net/1721.1/75439
https://orcid.org/0000-0001-7208-4360

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