Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film PZT fabrication processes

Thesis (M. Eng. in Manufacturing)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.

Bibliographic Details
Main Author:	Lee, Jun B., M. Eng. (Jun Bum). Massachusetts Institute of Technology
Other Authors:	Jung-Hoon Chun.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2013
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/78187

Internet

http://hdl.handle.net/1721.1/78187