Ink jet printing of PZT thin films for MEMS

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.

Bibliographic Details
Main Author:	Bathurst, Stephen, 1980-
Other Authors:	Sang Gook Kim.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2013
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/78236

Internet

http://hdl.handle.net/1721.1/78236