Large grain Ge growth on amorphous substrates for CMOS back-end-of-line integration of active optoelectronic devices

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.

Bibliographic Details
Main Author:	Pearson, Brian (Brian Sung-Il)
Other Authors:	Lionel C. Kimerling.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2013
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/78240

Internet

http://hdl.handle.net/1721.1/78240