Studying femtosecond-laser hyperdoping by controlling surface morphology

Studying femtosecond-laser hyperdoping by controlling surface morphology

We study the fundamental properties of femtosecond-laser (fs-laser) hyperdoping by developing techniques to control the surface morphology following laser irradiation. By decoupling the formation of surface roughness from the doping process, we study the structural and electronic properties of fs-la...

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Bibliographic Details
Main Authors: Winkler, Mark T., Sher, Meng-Ju, Lin, Yu-Ting, Smith, Matthew J., Zhang, Haifei, Mazur, Eric, Gradecak, Silvija
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering
Format: Article
Language:en_US
Published: American Institute of Physics (AIP) 2013
Online Access:http://hdl.handle.net/1721.1/79609

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http://hdl.handle.net/1721.1/79609

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