Studying femtosecond-laser hyperdoping by controlling surface morphology
We study the fundamental properties of femtosecond-laser (fs-laser) hyperdoping by developing techniques to control the surface morphology following laser irradiation. By decoupling the formation of surface roughness from the doping process, we study the structural and electronic properties of fs-la...
Main Authors: | Winkler, Mark T., Sher, Meng-Ju, Lin, Yu-Ting, Smith, Matthew J., Zhang, Haifei, Mazur, Eric, Gradecak, Silvija |
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Other Authors: | Massachusetts Institute of Technology. Department of Materials Science and Engineering |
Format: | Article |
Language: | en_US |
Published: |
American Institute of Physics (AIP)
2013
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Online Access: | http://hdl.handle.net/1721.1/79609 |
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