The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation

Surface texturing of silicon using femtosecond (fs) laser irradiation is an attractive method for enhancing light trapping, but the laser-induced damage that occurs in parallel with surface texturing can inhibit device performance. In this work, we investigate the light-material interaction during t...

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Bibliographic Details
Main Authors: Smith, Matthew J., Sher, Meng-Ju, Franta, Benjamin, Lin, Yu-Ting, Mazur, Eric, Gradecak, Silvija
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering
Format: Article
Language:en_US
Published: American Institute of Physics (AIP) 2013
Online Access:http://hdl.handle.net/1721.1/79627