The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation
Surface texturing of silicon using femtosecond (fs) laser irradiation is an attractive method for enhancing light trapping, but the laser-induced damage that occurs in parallel with surface texturing can inhibit device performance. In this work, we investigate the light-material interaction during t...
| Main Authors: | , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
American Institute of Physics (AIP)
2013
|
| Online Access: | http://hdl.handle.net/1721.1/79627 |
| _version_ | 1826192971005952000 |
|---|---|
| author | Smith, Matthew J. Sher, Meng-Ju Franta, Benjamin Lin, Yu-Ting Mazur, Eric Gradecak, Silvija |
| author2 | Massachusetts Institute of Technology. Department of Materials Science and Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Materials Science and Engineering Smith, Matthew J. Sher, Meng-Ju Franta, Benjamin Lin, Yu-Ting Mazur, Eric Gradecak, Silvija |
| author_sort | Smith, Matthew J. |
| collection | MIT |
| description | Surface texturing of silicon using femtosecond (fs) laser irradiation is an attractive method for enhancing light trapping, but the laser-induced damage that occurs in parallel with surface texturing can inhibit device performance. In this work, we investigate the light-material interaction during the texturing of silicon by directly correlating the formation of pressure-induced silicon polymorphs, fs-laser irradiation conditions, and the resulting morphology and microstructure using scanning electron microscopy, micro-Raman spectroscopy, and transmission electron microscopy. We show that raster scanning a pulsed laser beam with a Gaussian profile enhances the formation of crystalline pressure-induced silicon polymorphs by an order of magnitude compared with stationary pulsed fs-laser irradiation. Based on these observations, we identify resolidification-induced stresses as the mechanism responsible for driving sub-surface phase transformations during the surface texturing of silicon, the understanding of which is an important first step towards reducing laser-induced damage during the texturing of silicon with fs-laser irradiation. |
| first_indexed | 2024-09-23T09:31:59Z |
| format | Article |
| id | mit-1721.1/79627 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T09:31:59Z |
| publishDate | 2013 |
| publisher | American Institute of Physics (AIP) |
| record_format | dspace |
| spelling | mit-1721.1/796272022-09-26T12:03:17Z The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation Smith, Matthew J. Sher, Meng-Ju Franta, Benjamin Lin, Yu-Ting Mazur, Eric Gradecak, Silvija Massachusetts Institute of Technology. Department of Materials Science and Engineering Smith, Matthew J. Gradecak, Silvija Surface texturing of silicon using femtosecond (fs) laser irradiation is an attractive method for enhancing light trapping, but the laser-induced damage that occurs in parallel with surface texturing can inhibit device performance. In this work, we investigate the light-material interaction during the texturing of silicon by directly correlating the formation of pressure-induced silicon polymorphs, fs-laser irradiation conditions, and the resulting morphology and microstructure using scanning electron microscopy, micro-Raman spectroscopy, and transmission electron microscopy. We show that raster scanning a pulsed laser beam with a Gaussian profile enhances the formation of crystalline pressure-induced silicon polymorphs by an order of magnitude compared with stationary pulsed fs-laser irradiation. Based on these observations, we identify resolidification-induced stresses as the mechanism responsible for driving sub-surface phase transformations during the surface texturing of silicon, the understanding of which is an important first step towards reducing laser-induced damage during the texturing of silicon with fs-laser irradiation. Chesonis Family Foundation National Science Foundation (U.S.) (Award CBET 0754227) National Science Foundation (U.S.) (Award CHE-DMR-DMS 0934480) National Science Foundation (U.S.). ERC–QESST (EEC-1041895) United States. Dept. of Defense (National Defense Science and Engineering Graduate Fellowship, 32 CFR 168a) R. J. McElroy Trust 2013-07-18T18:44:33Z 2013-07-18T18:44:33Z 2012-10 2012-07 Article http://purl.org/eprint/type/JournalArticle 00218979 1089-7550 http://hdl.handle.net/1721.1/79627 Smith, Matthew J., Meng-Ju Sher, Benjamin Franta, Yu-Ting Lin, Eric Mazur, and Silvija Gradečak. “The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation.” Journal of Applied Physics 112, no. 8 (2012): 083518. © 2012 American Institute of Physics en_US http://dx.doi.org/10.1063/1.4759140 Journal of Applied Physics Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf American Institute of Physics (AIP) MIT web domain |
| spellingShingle | Smith, Matthew J. Sher, Meng-Ju Franta, Benjamin Lin, Yu-Ting Mazur, Eric Gradecak, Silvija The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation |
| title | The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation |
| title_full | The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation |
| title_fullStr | The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation |
| title_full_unstemmed | The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation |
| title_short | The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation |
| title_sort | origins of pressure induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation |
| url | http://hdl.handle.net/1721.1/79627 |
| work_keys_str_mv | AT smithmatthewj theoriginsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT shermengju theoriginsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT frantabenjamin theoriginsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT linyuting theoriginsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT mazureric theoriginsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT gradecaksilvija theoriginsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT smithmatthewj originsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT shermengju originsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT frantabenjamin originsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT linyuting originsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT mazureric originsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation AT gradecaksilvija originsofpressureinducedphasetransformationsduringthesurfacetexturingofsiliconusingfemtosecondlaserirradiation |