MOSFET channel engineering using strained Si and strained Ge grown on SiGe virtual substrates

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2003.

Bibliographic Details
Main Author:	Lee, Minjoo Lawrence, 1976-
Other Authors:	Eugene A. Fitzgerald.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/7966

Internet

http://hdl.handle.net/1721.1/7966