Monolithically integrated, resonant-cavity-enhanced dual-band mid-infrared photodetector on silicon

In this paper, we present experimental demonstration of a resonant-cavity-enhanced mid-infrared photodetector monolithically fabricated on a silicon substrate. Dual-band detection at 1.6 μm and 3.7 μm is achieved within a single detector pixel without cryogenic cooling, by using thermally evaporated...

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Bibliographic Details
Main Authors: Wang, Jianfei, Zens, Timothy, Hu, Juejun, Becla, Piotr, Kimerling, Lionel C., Agarwal, Anuradha Murthy
Other Authors: MIT Materials Research Laboratory
Format: Article
Language:en_US
Published: American Institute of Physics (AIP) 2013
Online Access:http://hdl.handle.net/1721.1/79743
https://orcid.org/0000-0002-7233-3918
https://orcid.org/0000-0002-0769-0652
https://orcid.org/0000-0002-3913-6189