Photo-induced trimming of chalcogenide-assisted silicon waveguides

A chalcogenide-assisted silicon waveguide is realized by depositing a thin layer of A[subscript 2]S[subscript 3] glass onto a conventional silicon on insulator optical waveguide. The photosensitivity of the chalcogenide is exploited to locally change the optical properties of the waveguide through e...

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Bibliographic Details
Main Authors: Kimerling, Lionel C., Canciamilla, Antonio, Morichetti, Francesco, Grillanda, Stefano, Velha, Philippe, Sorel, Marc, Singh, Vivek, Agarwal, Anuradha Murthy, Melloni, Andrea
Other Authors: MIT Materials Research Laboratory
Format: Article
Language:en_US
Published: Optical Society of America 2013
Online Access:http://hdl.handle.net/1721.1/79747
https://orcid.org/0000-0002-0282-8309
https://orcid.org/0000-0002-3913-6189