In situ study of hydrogen silsesquioxane dissolution rate in salty and electrochemical developers
In order to better characterize the development of the electron-beam resist hydrogen silsesquioxane (HSQ), the authors used a quartz crystal microbalance (QCM) to study its rate of dissolution in situ. The authors determined the effect of both salt concentration and applied electric potential on the...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
American Vacuum Society
2013
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| Online Access: | http://hdl.handle.net/1721.1/79832 https://orcid.org/0000-0001-7453-9031 |