An electrothermally-actuated bistable MEMS relay for power applications

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Bibliographic Details
Main Author: Qiu, Jin, 1974-
Other Authors: Alexander H. Slocum and Jeffrey H. Lang.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/8002