An electrothermally-actuated bistable MEMS relay for power applications
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
Main Author: | Qiu, Jin, 1974- |
---|---|
Other Authors: | Alexander H. Slocum and Jeffrey H. Lang. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2005
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/8002 |
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