Assessment of an infrared camera for use as a control sensor for the chemical mechanical planarization process

Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.

Bibliographic Details
Main Author:	Nishimoto, Angie Shizue, 1977-
Other Authors:	Duane S. Boning.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2013
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/80107

Internet

http://hdl.handle.net/1721.1/80107