Characterization and modeling of uniformity in chemical mechanical polishing

Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.

Bibliographic Details
Main Author:	Oji, Charles (Charles Ojih), 1974-
Other Authors:	Duane Boning and James Chung.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2013
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/80109

Internet

http://hdl.handle.net/1721.1/80109