Characterization and modeling of uniformity in chemical mechanical polishing

Characterization and modeling of uniformity in chemical mechanical polishing

Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.

Bibliographic Details
Main Author: Oji, Charles (Charles Ojih), 1974-
Other Authors: Duane Boning and James Chung.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2013
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/80109

Similar Items

Similar Items