Characterization and modeling of pattern dependencies in copper interconnects for integrated circuits

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.

Bibliographic Details
Main Author:	Park, Tae Hong, 1973-
Other Authors:	Duane S. Boning.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/8082

Internet

http://hdl.handle.net/1721.1/8082