Flow controlled solvent vapor annealing of block copolymers for lithographic applications

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2013.

Bibliographic Details
Main Author:	Gotrik, Kevin Willy
Other Authors:	Caroline A. Ross.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2013
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/81057

Internet

http://hdl.handle.net/1721.1/81057