Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.

Bibliographic Details
Main Author:	Deutsch, Erik R. (Erik Robertson), 1974-
Other Authors:	Stephen D. Senturia and Rajeev Ram.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/8118

Internet

http://hdl.handle.net/1721.1/8118