Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.

Bibliographic Details
Main Author: Deutsch, Erik R. (Erik Robertson), 1974-
Other Authors: Stephen D. Senturia and Rajeev Ram.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/8118