Photo-induced trimming of chalcogenide-assisted silicon photonic circuits

Photo-induced trimming of chalcogenide-assisted silicon photonic circuits

We present an innovative and efficient technique for post-fabrication trimming of silicon photonic integrated circuits (PICs). Our approach exploits the high photosensitivity of chalcogenide glasses (ChGs) to induce local and permanent modifications of the optical properties and spectral responses o...

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Bibliographic Details
Main Authors: Melloni, Andrea, Grillanda, Stefano, Canciamilla, Antonio, Ferrari, Carlo, Morichetti, Francesco, Strain, Michael, Sorel, Marc, Singh, Vivek, Agarwal, Anuradha Murthy, Kimerling, Lionel C.
Other Authors: MIT Materials Research Laboratory
Format: Article
Language:en_US
Published: SPIE 2013
Online Access:http://hdl.handle.net/1721.1/81199
https://orcid.org/0000-0002-0282-8309
https://orcid.org/0000-0002-3913-6189

Internet

http://hdl.handle.net/1721.1/81199
https://orcid.org/0000-0002-0282-8309
https://orcid.org/0000-0002-3913-6189

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