Optomechanical and photothermal interactions in suspended photonic crystal membranes

We present here an optomechanical system fabricated with novel stress management techniques that allow us to suspend an ultrathin defect-free silicon photonic-crystal membrane above a Silicon-on-Insulator (SOI) substrate with a gap that is tunable to below 200 nm. Our devices are able to generate st...

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Bibliographic Details
Main Authors: Woolf, David, Hui, Pui-Chuen, Iwase, Eiji, Khan, Mughees, Rodriguez, Alejandro W., Deotare, Parag, Bulu, Irfan, Johnson, Steven G., Capasso, Federico, Loncar, Marko
Other Authors: Massachusetts Institute of Technology. Department of Mathematics
Format: Article
Language:en_US
Published: Optical Society of America 2013
Online Access:http://hdl.handle.net/1721.1/81260
https://orcid.org/0000-0001-7327-4967