Optomechanical and photothermal interactions in suspended photonic crystal membranes
We present here an optomechanical system fabricated with novel stress management techniques that allow us to suspend an ultrathin defect-free silicon photonic-crystal membrane above a Silicon-on-Insulator (SOI) substrate with a gap that is tunable to below 200 nm. Our devices are able to generate st...
Main Authors: | , , , , , , , , , |
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Other Authors: | |
Format: | Article |
Language: | en_US |
Published: |
Optical Society of America
2013
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Online Access: | http://hdl.handle.net/1721.1/81260 https://orcid.org/0000-0001-7327-4967 |