Control of buckling in large micromembranes using engineered support structures
In this paper we describe a general method to avoid stress-induced buckling of thin and large freestanding membranes. We show that using properly designed supports, in the form of microbeams, we can reduce the out-of-plane deflection of the membrane while maintaining its stiffness. As a proof of pri...
| Main Authors: | , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
IOP Publishing
2013
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| Online Access: | http://hdl.handle.net/1721.1/81261 https://orcid.org/0000-0001-7327-4967 |