Design and fabrication of a multipurpose compliant nanopositioning architecture

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2013.

Bibliographic Details
Main Author:	Panas, Robert M. (Robert Matthew)
Other Authors:	Martin L. Culpepper IV.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2013
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/81754

Internet

http://hdl.handle.net/1721.1/81754