Complementary computational chemistry and surface science experiments of reaction pathways in aluminum chemical vapor deposition

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1999.

Bibliographic Details
Main Author:	Willis, Brian G
Other Authors:	Klavs F. Jensen.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/8180

Internet

http://hdl.handle.net/1721.1/8180