Design and control of a self-sensing piezoelectric reticle assist device

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2013.

Bibliographic Details
Main Author: Amin-Shahidi, Darya
Other Authors: David L. Trumper.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2013
Subjects:
Online Access:http://hdl.handle.net/1721.1/82167