High mobility strained Si/SiGe heterostructure MOSFETs : channel engineering and virtual substrate optimization

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002.

Bibliographic Details
Main Author:	Leitz, Christopher W. (Christopher William), 1976-
Other Authors:	Eugene A. Fitzgerald.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/8440

Internet

http://hdl.handle.net/1721.1/8440