Finite element model of thermoelastic damping in MEMS

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002.

Bibliographic Details
Main Author:	Gorman, John P. (John Patrick), 1973-
Other Authors:	Amy E. Duwel.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/8458

Internet

http://hdl.handle.net/1721.1/8458