The interactions of molecular fluorine and xenon difluoride with silicon

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemistry, 1999.

Bibliographic Details
Main Author:	Tate, Matthew Richard, 1972-
Other Authors:	Sylvia T. Ceyer.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Chemistry.
Online Access:	http://hdl.handle.net/1721.1/85293

Internet

http://hdl.handle.net/1721.1/85293