Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1999.

Bibliographic Details
Main Author:	Labelle, Catherine B., 1972-
Other Authors:	Karen K. Gleason.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/85358

Internet

http://hdl.handle.net/1721.1/85358