Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1999.

書目詳細資料
主要作者:	Labelle, Catherine B., 1972-
其他作者:	Karen K. Gleason.
格式:	Thesis
語言:	eng
出版:	Massachusetts Institute of Technology 2014
主題:	Chemical Engineering.
在線閱讀:	http://hdl.handle.net/1721.1/85358

因特網

http://hdl.handle.net/1721.1/85358