An evaluation of critical issues for microhydraulic transducers : silicon wafer bonding, strength of silicon on insulator membranes and gold-tin solder bonding

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.

Bibliographic Details
Main Author:	Turner, Kevin Thomas, 1977-
Other Authors:	S. Mark Spearing.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/8552

Internet

http://hdl.handle.net/1721.1/8552