Micro-scale scratching by soft pad asperities in chemical-mechanical polishing

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2013.

Bibliographic Details
Main Author:	Kim, Sanha, Ph. D. Massachusetts Institute of Technology
Other Authors:	Jung-Hoon Chun and Nannaji Saka.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/85537

Internet

http://hdl.handle.net/1721.1/85537