Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films
The registration and alignment of a monolayer of microdomains in a self-assembled block copolymer thin film can be controlled by chemical or physical templating methods. Although planar patterns are useful for nanoscale device fabrication, three-dimensional multilevel structures are required for som...
Päätekijät: | , , , , , |
---|---|
Muut tekijät: | |
Aineistotyyppi: | Artikkeli |
Kieli: | en_US |
Julkaistu: |
American Association for the Advancement of Science (AAAS)
2014
|
Linkit: | http://hdl.handle.net/1721.1/86080 https://orcid.org/0000-0003-2262-1249 https://orcid.org/0000-0002-9498-7808 https://orcid.org/0000-0001-7453-9031 https://orcid.org/0000-0001-5554-1283 |