Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films

Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films

The registration and alignment of a monolayer of microdomains in a self-assembled block copolymer thin film can be controlled by chemical or physical templating methods. Although planar patterns are useful for nanoscale device fabrication, three-dimensional multilevel structures are required for som...

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Bibliographic Details
Main Authors: Gotrik, Kevin W., Tavakkoli Kermani Ghariehali, Amir, Hannon, Adam F., Alexander-Katz, Alfredo, Ross, Caroline A., Berggren, Karl K.
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: American Association for the Advancement of Science (AAAS) 2014
Online Access:http://hdl.handle.net/1721.1/86080
https://orcid.org/0000-0003-2262-1249
https://orcid.org/0000-0002-9498-7808
https://orcid.org/0000-0001-7453-9031
https://orcid.org/0000-0001-5554-1283

Internet

http://hdl.handle.net/1721.1/86080
https://orcid.org/0000-0003-2262-1249
https://orcid.org/0000-0002-9498-7808
https://orcid.org/0000-0001-7453-9031
https://orcid.org/0000-0001-5554-1283

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