Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films
The registration and alignment of a monolayer of microdomains in a self-assembled block copolymer thin film can be controlled by chemical or physical templating methods. Although planar patterns are useful for nanoscale device fabrication, three-dimensional multilevel structures are required for som...
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| Format: | Article |
| Language: | en_US |
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American Association for the Advancement of Science (AAAS)
2014
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| Online Access: | http://hdl.handle.net/1721.1/86080 https://orcid.org/0000-0003-2262-1249 https://orcid.org/0000-0002-9498-7808 https://orcid.org/0000-0001-7453-9031 https://orcid.org/0000-0001-5554-1283 |
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| author | Gotrik, Kevin W. Tavakkoli Kermani Ghariehali, Amir Hannon, Adam F. Alexander-Katz, Alfredo Ross, Caroline A. Berggren, Karl K. |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Gotrik, Kevin W. Tavakkoli Kermani Ghariehali, Amir Hannon, Adam F. Alexander-Katz, Alfredo Ross, Caroline A. Berggren, Karl K. |
| author_sort | Gotrik, Kevin W. |
| collection | MIT |
| description | The registration and alignment of a monolayer of microdomains in a self-assembled block copolymer thin film can be controlled by chemical or physical templating methods. Although planar patterns are useful for nanoscale device fabrication, three-dimensional multilevel structures are required for some applications. We found that a bilayer film of a cylindrical-morphology block copolymer, templated by an array of posts functionalized with a brush attractive to the majority block, can form a rich variety of three-dimensional structures consisting of cylinder arrays with controllable angles, bends, and junctions whose geometry is controlled by the template periodicity and arrangement. This technique allows control of microdomain patterns and the ability to route and connect microdomains in specific directions. |
| first_indexed | 2024-09-23T12:53:40Z |
| format | Article |
| id | mit-1721.1/86080 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T12:53:40Z |
| publishDate | 2014 |
| publisher | American Association for the Advancement of Science (AAAS) |
| record_format | dspace |
| spelling | mit-1721.1/860802022-10-01T11:45:02Z Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films Gotrik, Kevin W. Tavakkoli Kermani Ghariehali, Amir Hannon, Adam F. Alexander-Katz, Alfredo Ross, Caroline A. Berggren, Karl K. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Department of Materials Science and Engineering Massachusetts Institute of Technology. Research Laboratory of Electronics Tavakkoli Kermani Ghariehali, Amir Gotrik, Kevin W. Hannon, Adam F. Alexander-Katz, Alfredo Ross, Caroline A. Berggren, Karl K. The registration and alignment of a monolayer of microdomains in a self-assembled block copolymer thin film can be controlled by chemical or physical templating methods. Although planar patterns are useful for nanoscale device fabrication, three-dimensional multilevel structures are required for some applications. We found that a bilayer film of a cylindrical-morphology block copolymer, templated by an array of posts functionalized with a brush attractive to the majority block, can form a rich variety of three-dimensional structures consisting of cylinder arrays with controllable angles, bends, and junctions whose geometry is controlled by the template periodicity and arrangement. This technique allows control of microdomain patterns and the ability to route and connect microdomains in specific directions. Semiconductor Research Corporation University of California, Los Angeles. Center on Functional Engineered Nano Architectonics Nanoelectronics Research Initiative Singapore-MIT Alliance 2014-04-07T19:47:07Z 2014-04-07T19:47:07Z 2012-06 2011-12 Article http://purl.org/eprint/type/JournalArticle 0036-8075 1095-9203 http://hdl.handle.net/1721.1/86080 Tavakkoli K. G., A., K. W. Gotrik, A. F. Hannon, A. Alexander-Katz, C. A. Ross, and K. K. Berggren. “Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films.” Science 336, no. 6086 (June 8, 2012): 1294–1298. https://orcid.org/0000-0003-2262-1249 https://orcid.org/0000-0002-9498-7808 https://orcid.org/0000-0001-7453-9031 https://orcid.org/0000-0001-5554-1283 en_US http://dx.doi.org/10.1126/science.1218437 Science Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf American Association for the Advancement of Science (AAAS) Prof. Berggren |
| spellingShingle | Gotrik, Kevin W. Tavakkoli Kermani Ghariehali, Amir Hannon, Adam F. Alexander-Katz, Alfredo Ross, Caroline A. Berggren, Karl K. Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films |
| title | Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films |
| title_full | Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films |
| title_fullStr | Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films |
| title_full_unstemmed | Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films |
| title_short | Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films |
| title_sort | templating three dimensional self assembled structures in bilayer block copolymer films |
| url | http://hdl.handle.net/1721.1/86080 https://orcid.org/0000-0003-2262-1249 https://orcid.org/0000-0002-9498-7808 https://orcid.org/0000-0001-7453-9031 https://orcid.org/0000-0001-5554-1283 |
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