Maskless parallel patterning with zone plate array lithography (ZPAL)

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.

Bibliographic Details
Main Author:	Gil, Darío, 1975-
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/86449

Internet

http://hdl.handle.net/1721.1/86449