Maskless parallel patterning with zone plate array lithography (ZPAL)

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.

Détails bibliographiques
Auteur principal:	Gil, Darío, 1975-
Autres auteurs:	Henry I. Smith.
Format:	Thèse
Langue:	eng
Publié:	Massachusetts Institute of Technology 2014
Sujets:	Electrical Engineering and Computer Science.
Accès en ligne:	http://hdl.handle.net/1721.1/86449

Internet

http://hdl.handle.net/1721.1/86449