Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/86668 |
| _version_ | 1811095144058847232 |
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| author | Pruette, Laura C. (Laura Catherine), 1974- |
| author2 | Rafael Reif. |
| author_facet | Rafael Reif. Pruette, Laura C. (Laura Catherine), 1974- |
| author_sort | Pruette, Laura C. (Laura Catherine), 1974- |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. |
| first_indexed | 2024-09-23T16:11:21Z |
| format | Thesis |
| id | mit-1721.1/86668 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T16:11:21Z |
| publishDate | 2014 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/866682019-04-12T14:41:36Z Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction Pruette, Laura C. (Laura Catherine), 1974- Rafael Reif. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. Includes bibliographical references (p. 295-301). by Laure C. Pruette. Ph.D. 2014-05-07T16:56:54Z 2014-05-07T16:56:54Z 2001 2001 Thesis http://hdl.handle.net/1721.1/86668 49201932 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 301 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Pruette, Laura C. (Laura Catherine), 1974- Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction |
| title | Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction |
| title_full | Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction |
| title_fullStr | Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction |
| title_full_unstemmed | Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction |
| title_short | Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction |
| title_sort | oxide etching with nf₃ hydrocarbon chemistries for global warming emissions reduction |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/86668 |
| work_keys_str_mv | AT pruettelauraclauracatherine1974 oxideetchingwithnf3hydrocarbonchemistriesforglobalwarmingemissionsreduction |