Evaluation of unsaturated fluorocarbons for dielectric Etch applications
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 2003.
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| Format: | Abschlussarbeit |
| Sprache: | eng |
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Massachusetts Institute of Technology
2014
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| Online Zugang: | http://hdl.handle.net/1721.1/86859 |