Evaluation of unsaturated fluorocarbons for dielectric Etch applications

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 2003.

Bibliographic Details
Main Author:	Chatterjee, Ritwik, 1974-
Other Authors:	Rafael Reif.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/86859

Internet

http://hdl.handle.net/1721.1/86859