Decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements
Microfabricated cantilever beams have been used in microelectromechanical systems for a variety of sensor and actuator applications. Bimorph cantilevers accurately measure temperature change and heat flux with resolutions several orders of magnitude higher than those of conventional sensors such as...
| Hoofdauteurs: | , , , |
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| Formaat: | Artikel |
| Taal: | en_US |
| Gepubliceerd in: |
American Institute of Physics (AIP)
2014
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| Online toegang: | http://hdl.handle.net/1721.1/86894 https://orcid.org/0000-0001-8121-8017 https://orcid.org/0000-0002-3973-8067 https://orcid.org/0000-0002-3968-8530 |