Decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements
Microfabricated cantilever beams have been used in microelectromechanical systems for a variety of sensor and actuator applications. Bimorph cantilevers accurately measure temperature change and heat flux with resolutions several orders of magnitude higher than those of conventional sensors such as...
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| Format: | Article |
| Language: | en_US |
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American Institute of Physics (AIP)
2014
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| Online Access: | http://hdl.handle.net/1721.1/86894 https://orcid.org/0000-0001-8121-8017 https://orcid.org/0000-0002-3973-8067 https://orcid.org/0000-0002-3968-8530 |
| _version_ | 1826189250189590528 |
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| author | Burg, Brian R. Tong, Jonathan K. Hsu, Wei-Chun Chen, Gang |
| author2 | Massachusetts Institute of Technology. Department of Mechanical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Mechanical Engineering Burg, Brian R. Tong, Jonathan K. Hsu, Wei-Chun Chen, Gang |
| author_sort | Burg, Brian R. |
| collection | MIT |
| description | Microfabricated cantilever beams have been used in microelectromechanical systems for a variety of sensor and actuator applications. Bimorph cantilevers accurately measure temperature change and heat flux with resolutions several orders of magnitude higher than those of conventional sensors such as thermocouples, semiconductor diodes, as well as resistance and infrared thermometers. The use of traditional cantilevers, however, entails a series of important measurement limitations, because their interactions with the sample and surroundings often create parasitic deflection forces and the typical metal layer degrades the thermal sensitivity of the cantilever. The paper introduces a design to address these issues by decoupling the sample and detector section of the cantilever, along with a thermomechanical model, the fabrication, system integration, and characterization. The custom-designed bi-arm cantilever is over one order of magnitude more sensitive than current commercial cantilevers due to the significantly reduced thermal conductance of the cantilever sample arm. The rigid and immobile sample section offers measurement versatility ranging from photothermal absorption, near-field thermal radiation down to contact, conduction, and material thermal characterization measurements in nearly identical configurations. |
| first_indexed | 2024-09-23T08:11:50Z |
| format | Article |
| id | mit-1721.1/86894 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T08:11:50Z |
| publishDate | 2014 |
| publisher | American Institute of Physics (AIP) |
| record_format | dspace |
| spelling | mit-1721.1/868942022-09-23T11:32:27Z Decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements Burg, Brian R. Tong, Jonathan K. Hsu, Wei-Chun Chen, Gang Massachusetts Institute of Technology. Department of Mechanical Engineering Chen, Gang Burg, Brian R. Tong, Jonathan K. Hsu, Wei-Chun Chen, Gang Microfabricated cantilever beams have been used in microelectromechanical systems for a variety of sensor and actuator applications. Bimorph cantilevers accurately measure temperature change and heat flux with resolutions several orders of magnitude higher than those of conventional sensors such as thermocouples, semiconductor diodes, as well as resistance and infrared thermometers. The use of traditional cantilevers, however, entails a series of important measurement limitations, because their interactions with the sample and surroundings often create parasitic deflection forces and the typical metal layer degrades the thermal sensitivity of the cantilever. The paper introduces a design to address these issues by decoupling the sample and detector section of the cantilever, along with a thermomechanical model, the fabrication, system integration, and characterization. The custom-designed bi-arm cantilever is over one order of magnitude more sensitive than current commercial cantilevers due to the significantly reduced thermal conductance of the cantilever sample arm. The rigid and immobile sample section offers measurement versatility ranging from photothermal absorption, near-field thermal radiation down to contact, conduction, and material thermal characterization measurements in nearly identical configurations. United States. Dept. of Energy. Division of Materials Sciences and Engineering (DE-FG02-02ER45977) United States. Air Force Office of Scientific Research. Multidisciplinary University Research Initiative (UIUC FA9550-08-1-0407) 2014-05-09T14:12:51Z 2014-05-09T14:12:51Z 2012-10 2012-07 Article http://purl.org/eprint/type/JournalArticle 00346748 1089-7623 http://hdl.handle.net/1721.1/86894 Burg, Brian R., Jonathan K. Tong, Wei-Chun Hsu, and Gang Chen. “Decoupled Cantilever Arms for Highly Versatile and Sensitive Temperature and Heat Flux Measurements.” Review of Scientific Instruments 83, no. 10 (2012): 104902. https://orcid.org/0000-0001-8121-8017 https://orcid.org/0000-0002-3973-8067 https://orcid.org/0000-0002-3968-8530 en_US http://dx.doi.org/10.1063/1.4758093 Review of Scientific Instruments Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf American Institute of Physics (AIP) Bolin Liao |
| spellingShingle | Burg, Brian R. Tong, Jonathan K. Hsu, Wei-Chun Chen, Gang Decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements |
| title | Decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements |
| title_full | Decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements |
| title_fullStr | Decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements |
| title_full_unstemmed | Decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements |
| title_short | Decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements |
| title_sort | decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements |
| url | http://hdl.handle.net/1721.1/86894 https://orcid.org/0000-0001-8121-8017 https://orcid.org/0000-0002-3973-8067 https://orcid.org/0000-0002-3968-8530 |
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