Decoupled cantilever arms for highly versatile and sensitive temperature and heat flux measurements
Microfabricated cantilever beams have been used in microelectromechanical systems for a variety of sensor and actuator applications. Bimorph cantilevers accurately measure temperature change and heat flux with resolutions several orders of magnitude higher than those of conventional sensors such as...
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
American Institute of Physics (AIP)
2014
|
| Online Access: | http://hdl.handle.net/1721.1/86894 https://orcid.org/0000-0001-8121-8017 https://orcid.org/0000-0002-3973-8067 https://orcid.org/0000-0002-3968-8530 |