Large-scale 2D electronics based on single-layer MoS[subscript 2] grown by chemical vapor deposition

2D nanoelectronics based on single-layer MoS[subscript 2] offers great advantages for both conventional and ubiquitous applications. This paper discusses the large-scale CVD growth of single-layer MoS[subscript 2] and fabrication of integrated devices and circuits for the first time. Fundamental bui...

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Bibliographic Details
Main Authors: Wang, H., Yu, L., Lee, Y.-H., Fang, W., Hsu, Allen Long, Chin, M., Dubey, Madan, Li, L.-J., Kong, Jing, Herring, Patrick Kenichi, Palacios, Tomas
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers (IEEE) 2014
Online Access:http://hdl.handle.net/1721.1/87106
https://orcid.org/0000-0002-3416-3962
https://orcid.org/0000-0001-5777-8364
https://orcid.org/0000-0003-0551-1208
https://orcid.org/0000-0002-2190-563X